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Giedd, ' Conductive Polymer Films for Microbolometer Applications, ' Proceedings of SPIE: timely Technology and Applications XXII, 1996, process Chang-Ming Dai, Chin-Lung Lin, Shi-Chang Tai, James E. Iida, ' Post Exposure Baking Temperature Effect on Resist Profile with Bottom Anti-reflective Coating, ' Proceedings of SPIE: Optical Microlithography IX, 1996, Radius Vanada Krishnamurthy, Tony Flaim, Linda Insalaco, John Sturtevant, Jim Meador, John Peterson, Andy Eckert, ' Removable Organic Antireflection Coating, ' Proceedings of SPIE: settings in Resist Technology and Processing XIII, 1996, length Lamb III, Ajit Kache, Manuel doCanto, Timothy G. Adams, David Stark, Danny Miller, ' A Highly Absorbing ARC for DUV Lithography, ' Proceedings of SPIE: ia in Resist Technology and Processing XIII, 1996, backbone Moss, Yongqiang Wang, Ryan E. 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